Microsensors, MEMS, and smart devices /
Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim.
- Chichester ; New York : J. Wiley and sons, ltd., c2001.
- xvi, 503 p. : ill. ; 25 cm.
Includes bibliographical references and index.
047186109X 9780471861096
GBA307945 bnb
Microelectromechanical systems. Detectors. Intelligent control systems.