Gardner, J. W. 1958-

Microsensors, MEMS, and smart devices / Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim. - Chichester ; New York : J. Wiley and sons, ltd., c2001. - xvi, 503 p. : ill. ; 25 cm.

Includes bibliographical references and index.

047186109X 9780471861096

GBA307945 bnb


Microelectromechanical systems.
Detectors.
Intelligent control systems.