TY  - BOOK
AU  - Gardner,J.W.
AU  - Varadan,V.K.
AU  - Awadelkarim,Osama O.
TI  - Microsensors, MEMS, and smart devices
SN  - 047186109X
PY  - 2001///
CY  - Chichester, New York
PB  - J. Wiley and sons, ltd.
KW  - Microelectromechanical systems
KW  - Detectors
KW  - Intelligent control systems
N1  - Includes bibliographical references and index
ER  -